Sample Preparation Challenges in Advanced Semiconductor Test Structures
نویسندگان
چکیده
منابع مشابه
An Open Architecture for Semiconductor Test: Enablers and Challenges
Overview The semiconductor test equipment industry has a history of being dominated by proprietary architectures that race to keep pace with increasing device complexity, device performance, and cost pressures. However, recent ATE design trends are resulting in modular hardware and software architectures with single board digital and analog instruments that reside in test head based systems. Th...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2019
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s143192761900415x